Distinguished Service Award

2005 DIVISION OF POLYMERIC MATERIALS: SCIENCE AND ENGINEERING
DISTINGUISHED SERVICE AWARD

The recipient of the 2005 American Chemical Society (ACS) Division of Polymeric Materials: Science and Engineering (PMSE) Distinguished Service Award is, Dr. Larry F. Thompson. Larry served the PMSE Division and the ACS for over 20 years. He served as the Division’s Chair and held many other positions including Councilor from 1985 through 1992. He was a member of the ACS Board of Directors from 1992 through 1996.

Larry F. Thompson is Managing Partner of the Intellectual Property Solutions and Services, LP (IPSS-LP) Consulting Company. He has worked in the semiconductor industry for 35 years in the areas of materials research and semiconductor process development at Bell Laboratories as well as in the semiconductor equipment industry at Integrated Solutions and Ultratech Stepper. He has held senior management positions since 1994 including CTO of Integrated Solutions and a member of the board of directors. At Ultratech Stepper he served as Senior Vice President of Technology and President of the Ultrabeam Lithography Division. Dr. Thompson received his B.S. degree in Chemistry and M.S. degree in Chemistry/Nuclear Engineering from Tennessee Technological University. He holds a PhD in Chemistry/Chemical Engineering from the University of Missouri. He has over 160 publications and holds 28 patents in the areas of semiconductor processing and materials engineering. He is a member of the National Academy of Engineering.

As a research engineer at Bell Laboratories he invented, developed and introduced into manufacture several polymeric resist materials used to produce chromium masks including PBS and COP. He managed the group responsible for developing chemically amplified deep-uv resists and was instrumental in developing the 248nm lithography technology. He won the Semiconductor Equipment and Materials Industry Association (SEMI) award for Innovation for this contribution. He has worked in many areas in semiconductor processing including advanced lithography, plasma processing and new materials. During his career at Bell Laboratories, he held several management positions in Research and Development. He worked with the Intellectual Property Division and was instrumental in several significant licensing agreements including electron beam lithography for mask fabrication and deep-UV resist materials.

After leaving Bell Labs he joined Integrated Solutions Inc. (ISI) and served as the Chief Technical Officer and a member of the Board of Directors. He led the effort to license the advanced XLS stepper technology from General Signal Corporation. At ISI he managed the design and introduction into manufacture of the world’s first 193nm deep – UV lithography stepper. In 1997, he was instrumental in the successful sale of ISI to Ultratech Stepper where he served as Senior Vice President of Advanced Technology and President of the Ultrabeam Lithography Division. He currently serves on the Ultratech Technical Advisory Board, The Strategic Advisory Board of DuPont Electronic Materials Division and Brewer Science Board.

In June of 2002, he became CEO and President of the New Jersey Nanotechnology Consortium and was responsible for setting up an independent, for-profit company to capitalize on the Advanced Semiconductor Development Laboratory facilities and personnel of Lucent Technologies, Bell Laboratories.

He currently is president of his own consulting business in the area of intellectual property, semiconductor materials, equipment and processing.

Past recipients of the Distinguished Service Award include:

1993	Roy W. Tess
1994	E. E. McSweeney
1995	Louis J. Nowacki
1996	Kenneth N. Edwards
1999	Clara D. Craver
2000	Sandy Labana
2001	John Lupinski
2002	Charles E. Carraher
2003	Theodore Provder
2004	Ray Dickie
2005	Larry F. Thompson

Past Distinguished Service Award Winners

2001 Service Award Winner

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